Vacuum Pump Parts

VPI offers a full line of vacuum pump parts for all makes and manufacturers. Visit our sister site to find out more and purchase the parts you need!

Vacuum Pump Parts

Used, Refurbished, and Rebuilt Equipment

VPI offers a variety of quality, used vacuum equipment:

  • new and used vacuum furnaces all sizes and types
  • used and rebuilt vacuum pumps
  • hot zone and control rebuilds
  • in house pump rebuilding diffusion pumps, piston, vane, blowers

All used equipment offers a “rebuild/refurbish” option that includes a warranty. If a customer does not wish to have this option, all used equipment is sold “as is.”

View Available Used Equipment

Oils and Filters

Vacuum Process Inc. features OEM Oils and Filters for your vacuum pumps or vacuum system. Equipment costs are high and proper maintenance is one way to eliminate unnecessary costs due to neglected equipment. The proper maintenance involves regular oil changes to ensure your system has 100 percent quality fluids and also helps the efficiency of your system and can save you time and money.

Oils and Filters

If you didn’t find what you were looking for or have another questions, please.

Contact Us

Rental Equipment

Have a short-term job that needs a vacuum system? Let Vacuum Processes, Inc. fill your need for you. We have a variety of different equipment options to suit your needs. With drop-off and pick-up options available, a short-term solution to your vacuum system needs has never been easier.

Request a Quote